提升氣膠沉積法製作之鋯鈦酸鉛(PZT)微型壓電能量擷取器元件效能之研究與實作

林莛凱

doi:10.6342/NTU201704068

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提升气胶沉积法制作之锆钛酸铅(PZT)微型压电能量撷取器元件效能之研究与实作

Performance improvement of PZT micro piezoelectric energy harvester fabricated by Aerosol deposition method

林莛凯 , 硕士　　导师：吴文中　　

繁体中文 DOI： 10.6342/NTU201704068

锆钛酸铅；压电材料；气胶沉积法；能量撷取；微机电制程； PZT ； piezoelectric material ； aerosol deposition ； energy harvester ； MEMS

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摘要 │ 参考文献 (35) │ 国际计量

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For past years the idea of "Internet of Things(IoT)" has become more expanding, which makes the demand of low power consumption sensors increased rapidly. In generally we use power lines or battery to drive these sensors. However, powering the sensors in remote areas with power lines is costly no matter in installation or maintenance. On the other hand, using battery can solve the problems, but the maintenance issue and risk of environmental pollution will emerge. Summing up the above reasons, scavenging energy from varying ambient energy sources and transferring them into electricity to drive the end devices, or called "Self-powered technology", seems to be a better solution to completely solve the problems, maximize the application scope and lifetime for IoT sensors.
This thesis is based on scavenging the environmental vibration energy. Comparing to solar power, vibration energy is capable to provide energy no matter indoor or not. The power density of ambient vibration is also high enough to be exploited due to the past researches. By utilizing the piezoelectric material PZT we successfully fabricated cantilever structure piezoelectric energy harvester. A static force analysis for cantilever structure to evaluate effective piezoelectric constant d31 of thin film piezoelectric material is also presented. Combining the study for improving Aerosol deposition method (ADM) efficiency, the optimization of annealing and poling process, and metal micro electro-mechanical system (MEMS) process, we accomplished the stainless-based cantilever structure piezoelectric energy harvesters. The output performance could reach more than 300μW at 0.5g resonant frequency. The power density was better than all studies made before. The results show that our device is very close to practical application.
Keyword: PZT, piezoelectric material, aerosol deposition, energy harvester, MEMS

参考文献 ( 35 ) 〈TOP〉

[13] Kanno, Isaku, et al. "Power-generation performance of lead-free (K, Na) NbO 3 piezoelectric thin-film energy harvesters." Sensors and Actuators A: Physical 179 (2012): 132-136.
连结：
[14] Arroyo, Emmanuelle, et al. "High temperature performance of a piezoelectric micro cantilever for vibration energy harvesting." Journal of Physics: Conference Series. Vol. 773. No. 1. IOP Publishing, 2016.
连结：
[15] Van Minh, L., et al. "Vibrational micro-energy harvesters utilizing Nb-doped Pb (Zr, Ti) O3 films on stainless steel substrates." Journal of Physics: Conference Series. Vol. 773. No. 1. IOP Publishing, 2016.
连结：
[16] Aktakka, Ethem Erkan, and Khalil Najafi. "A six-axis micro platform for in situ calibration of MEMS inertial sensors." Micro Electro Mechanical Systems (MEMS), 2016 IEEE 29th International Conference on. IEEE, 2016.
连结：
[18] Lippmann, G. "Principe de la conservation de l'électricité" [Principle of the conservation of electricity]. Annales de chimie et de physique (in French). 24: 145, 1881.
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引用含有DOI的文献

DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。 如想对DOI的使用与概念有进一步了解，请参考 （ ） 。

DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。如想对DOI的使用与概念有进一步了解，请参考（）。