六自由度史都沃特平台之力與位移強健控制系統於奈米定位之研究

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doi:10.6840/cycu201700122

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六自由度史都沃特平台之力与位移强健控制系统於奈米定位之研究

A Robust Position/Force Control System Design of 6DOF Stewart Platform for Nanoscale Positioning

阮文寿 , 博士　　导师：丁镛　　

英文 DOI： 10.6840/cycu201700122

六自由度史都沃特型平台；磁滞前馈控制器；指数加权移动平均(EWMA)方法；预测校正控制器(PCC)方法；力回馈控制器； 6DOF Stewart-type platform ； feedforward hysteresis controller ； Exponentially Weighted Moving Average (EWMA) ； Predictor Corrector Control (PCC) ； force feedback controller

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摘要 │ 参考文献 (249) │ 国际计量

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This study focuses on the development of appropriate control method for a 6DOF Stewart-type platform driven by piezoelectric actuators. It is aimed to preserve good positioning accuracy while encountered with external forces in particular. Kinematic calibration is firstly carried out by using pose measurement to improve the accuracy of kinematic parameters. Negative factors of using piezoelectric actuators such as nonlinear hysteresis, creep, drifting disturbance, and temperature rise that directly affect the accuracy and steadiness of the system are concerned. In this article, modeling of the hysteresis of a piezoelectric actuator is derived to build a hysteresis feedforward controller by means of Preisach method that is able to deal with the rate-independent nonlinear hysteresis. Exponentially Weighted Moving Average (EWMA) method has been widely used in statistical process control and verified its capability of overcoming systematic change and drift disturbance. An attempt is to map the EWMA method into a run-to-run (RtR) Model Reference Adaptive System (MRAS) and combine with the hysteresis feedforward controller for position control. Similarly, a Predictor Corrector Control (PCC) with two stages of EWMA formulas is also used and verified its capability of overcoming the drifting disturbance due to creep and temperature dependence of piezoelectric actuators. 
Besides the position controller, an improved robust force feedback controller that is based on the idea of combining a nonlinear PID controller with the computed torque method is also investigated. The algorithm provides an essential way of dealing with unacknowledged interacting forces and variations of the environment characteristics. An example of surface grinding on different materials is investigated. Force sensor and capacitive displacement sensors are used to measure the interacting forces and the deformation respectively on the surface where the indentor tool is attached. Several case studies are performed to evaluate its effectiveness and robustness of the proposed controller. Comparison of the proposed controller with other controllers for free-space motion as well as for manipulation encountered with external load is carried out. The experiment results show that using the proposed composite controller is much better than using the feedforward or force feedback controller alone. The position accuracy can achieve root mean square error RMSE (x:95.436nm, y:172.513nm, z:1111.581nm) in translation and (θx:1.112nrad, θy:1.009 nrad, θz:0.689nrad) in orientation for free-space manipulation and RMSE (x:257.442nm, y:182.306nm, and z:1187.987nm) in translation and (θx:3.35nrad, θy:7.015 nrad, θz:0.687nrad) in orientation while encountered with external load.

参考文献 ( 249 ) 〈TOP〉

Society, vol. 34, pp. 2857-2864, 9/2014. (SCI)
连结：
Dynamics Force Feedback Control for a 6DOF Stewart-type Platform," in
连结：
[5] T. V. Nguyen, Y. Ting, Robust Nonlinear Force Control for a 6DOF Nano-
连结：
of a Composite Piezoelectric Ceramic Motor," in Twenty- fth International
连结：
Conference on Proceeding and Fabrication of Advanced Materials (PFAM-XXV),
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DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。 如想对DOI的使用与概念有进一步了解，请参考 （ ） 。

DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。如想对DOI的使用与概念有进一步了解，请参考（）。