膠體微影聚苯乙烯微球排列之設備開發與製程研究

高鈺珉

doi:10.6840/cycu201700743

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胶体微影聚苯乙烯微球排列之设备开发与制程研究

Development of colloidal arrangement equipment and process of polystyrene micro spheres

高钰珉 , 硕士　　导师：李有璋　　

繁体中文 DOI： 10.6840/cycu201700743

胶体微影；自组装排列；自动化设备； Colloid lithography ； self - assembled arrangement ； automation equipment

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摘要 │ 参考文献 (28) │ 国际计量

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Colloidal lithography has been recently developed since it can fabricate micro- to nano-size structure for cost-effective process and material. However, the colloidal lithography has the difficulty to control the sphere arrangement manually, and the effective arrangement area is small. This thesis focuses on the development of automation equipment based on the gas-liquid interface floating method of the colloidal lithography. The equipment design and process development are two portions of this study..
The automation equipment is divided into 5 modules Each module uses the stepping motor and the ballscrew to transform the  rotateing motion to a linear motion. Programmable logic controller (PLC) is used to precisely control process parameters and the interaction between the modules to reduce the impact of the human factor. For the process, causes of defects and the corresponding process parameters in the hexagonal close packed arrangement have been discussed. Defects were reduced greatly by increasing the concentration of the suspension solution for reducing the DI-water from 3.4 g to 0.68 of , increasing injection number of the solution from 3 to 4 times, increasing the backward pushing distance of the baffle from 0.1 mm to 1 mm, and reducing the injection amount of the solution from decreasing the pump module motor speed from 5 rpm to 1 rpm. The final analysis of artificial and equipment arrangement of grain differences and reasons.The development process by automation equipment has arranged successfully the polystyrene spheres on a 4-inch wafer.

参考文献 ( 28 ) 〈TOP〉

[2] C. M. Tseng, Y. Y. Lu, M. S. El-Aasser, and J. W. Vanderhoff, “Uniform Polymer Particles by Dispersion Polymerization in Alcohol,” J. Polym. Sci., Part A: Polym. Chem. Ed., Vol. 24, pp.2995, 1986.
连结：
[3] A. J. Paine, “Dispersion Polymerization of Styrene in Polar Solvents. 7. ASimple Mechanistic Model to Predict Particle Size,” Macromol., Vol. 23, pp. 3109, 1990.
连结：
[4] J. S. Song, F. Tronc, and M. A. Winnik, “Two-Stage Dispersion Polymerization toward Monodisperse, Controlled Micrometer-Sized Copolymer Particles,” Am. Chem. Soc., Vol. 126, pp. 6562, 2004.
连结：
[6] J. S. Song, and M. A. Winnik, “Cross-Linked, Monodisperse, Micron-Sized Polystyrene Particles by Two-Stage Dispersion Polymerization,” Macromol., Vol. 38, pp. 8300, 2005.
连结：
[7] O. D. Velev, T. A. Jede, R. F. Lobo, and A. M. Lenhoff, “Microstructured Porous Silica Obtained via Colloidal Crystal Templates,” Chem. Mater., Vol. 10, pp. 3597, 1998.
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引用含有DOI的文献

DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。 如想对DOI的使用与概念有进一步了解，请参考 （ ） 。

DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。如想对DOI的使用与概念有进一步了解，请参考（）。