使用奈米碳粉與PDMS的導電彈性複合材料配合軟微影黃光製程技術製作高敏感度彈性應變感測器

韓奇叡

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使用奈米碳粉与PDMS的导电弹性复合材料配合软微影黄光制程技术制作高敏感度弹性应变感测器

Using Soft Photolithography to Fabricate Conductive Carbon-PDMS Composites for High Sensitivity Flexible Strain Gauges

韩奇叡 , 硕士　　导师：郑云谦　　

繁体中文

软微影技术；聚二甲基矽氧烷；奈米碳粉；可挠性感测器； Soft lithography ； PDMS ； Carbon black ； Flexible sensors

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摘要 │ 参考文献 (34) │ 国际计量

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In this study, a high sensitivity, flexible strain sensor is fabricated by using soft lithography. Flexible sensors are more suitable applied on human body sensing than conventional sensors. Flexible strain sensors are usually fabricated by photolithography. However, the disadvantage of photolithography is that it will take too many processes, so it is unsuitable in mass production. Hence, we will fabricate flexible strain sensor by using soft lithography that uses less processes than photolithography, so that it will be suitable in mass production. Moreover, the piezoresistive coefficient and sensitivity of flexible strain sensor will be increased by changing size parameters such as length, width and thickness.
In this study, flexible material PDMS and conductive material carbon black are used to fabricate conductive elastomer CPDMS. The different shape of CPDMS micro structure is fabricated by using micro-patterning, and the different thickness of CPDMS micro structures is fabricated by increased repetitive printing number. The piezoresistance of the strain gauges is measured, and then the gauge factor of the strain gauge is evaluated. Experiment results show that the piezoresistive coefficient of CPDMS with the optimal proportions is approximately linear. Fabrication results show that when the repetitive printing number is increased, the thickness of CPDMS will be increased. Gauge factor measure result show that the number of grids of the strain gauges will affect gauge factor, the gauge factor of Grid5 strain gauge is the highest. In addition, the thickness of strain gauge will affect gauge factor, the gauge factor of thin strain gauge is the highest. The highest gauge factor is 5.07.

参考文献 ( 34 ) 〈TOP〉

[2] T. Yamada, Y. Hayamizu, Y. Yamamoto, Y. Yomogida, A. Najafabadi, D. N. Futaba, et al., "A stretchable carbon nanotube strain sensor for human-motion detection," NATURE NANOTECHNOLOGY, vol. 6, pp. 296-301, 2011.
连结：
[3] H.-S. Chuang and S. Wereley, "Design, fabrication and characterization of a conducting PDMS for microheaters and temperature sensors," Journal of Micromechanics and Microengineering, vol. 9, pp. 1-7, 2009.
连结：
[4] D. J. Lipomi, M. Vosgueritchian, B. C.-K. Tee, S. L. Hellstrom, J. A. Lee, C. H. Fox, et al., "Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes," NATURE NANOTECHNOLOGY, vol. 6, pp. 788-792, 2011.
连结：
[5] N.-K. Chang, C.-C. Su, and S.-H. Changa, "Fabrication of single-walled carbon nanotube flexible strain sensors with high sensitivity," Applied Physics Letters, vol. 92, pp. 1-3, 2008.
连结：
[6] X. Wang, Y. Gu, Z. Xiong, Z. Cui, and T. Zhang, "Silk-Molded Flexible, Ultrasensitive, and Highly Stable Electronic Skin for Monitoring Human Physiological Signals," Advanced Materials, vol. 26, pp. 1336-1342, 2014.
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使用DOI作为永久连结

引用含有DOI的文献

DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。 如想对DOI的使用与概念有进一步了解，请参考 （ ） 。

DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。如想对DOI的使用与概念有进一步了解，请参考（）。