高分子複合材輔助水熱法成長雙軸向規則排列氧化鋅晶體薄膜

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高分子复合材辅助水热法成长双轴向规则排列氧化锌晶体薄膜

The study of the hydrothermal growth of biaxially oriented ZnO layers through the assistance of polymer composite

颜士乔 , 硕士　　导师：陈厚光　　

繁体中文

氧化锌；高分子复合材；侧向磊晶； ZnO ； polymer composite ； lateral epitaxial

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摘要 │ 参考文献 (40) │ 国际计量

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In this study, the hydrothermal growth of ZnO films with biaxial alignment were implemented by the assistance of ZnO/polymer composite templates. This thesis can be divided into two parts: (1) ZnO microrods/polymer composites promote biaxially oriented growth of ZnO films; (2) patterned ZnO/polymer composites promote biaxially oriented growth of ZnO films.
	For preparation of ZnO microrods/polymer composite, we infiltrated polymethyl methacrylate (PMMA) into epitaxial ZnO microrod arrays on sapphire substrates. After curing, the resulting ZnO/polymer composite layers were transferred to PMMA sheets by combining solvent-bonding and peel-off processing. It was evident that the ZnO microrods embedded in the polymer matrix retained in-plane alignment of ZnO microrods originally grown on sapphire substrates. The hydrothermal growth of ZnO were performed on the opposite face of ZnO microrods/polymer composite. To obtain full coalesced ZnO layer, the addition of sodium citrate into growth solution let to promote the growth of ZnO in lateral directions. Eventually, the biaxially oriented ZnO layer can be grown on the composite templates. 
For patterned ZnO/ polymer composites promote biaxially oriented growth of ZnO films, patterned epitaxial ZnAl2O4 buffer layers were fabricated on sapphire substrates by combining lift-off and solid state reaction processing. Three kinds of pattern designs, hexagonal array, honeycomb, and modified hexagonal array, were employed to fabricate pattern buffer layers, respectively. Site-controlled growth of patterned ZnO structures on the patterned buffer layers was realized by low-temperature hydrothermal processing. The three kinds of patterned ZnO structures can be transferred onto PMMA sheet by combining solvent-bonding and peel-off processing to prepare patterned ZnO/PMMA composite templates. The fully coalesced growth of biaxially oriented ZnO layers on the three kinds of patterned ZnO/polymer composite was evident. The coalesced ZnO layer grown on the patterned ZnO/PMMA composite with conventional hexagonal array exhibited flat and better crystalline quality. In this study, the microstructures and optical properties of coalesced ZnO layers grown on patterned ZnO/PMMA composite templates with various pattern designs were investigated by x-ray diffraction and photoluminescence measurement.

参考文献 ( 40 ) 〈TOP〉

[2]. M. Joseph, H. Tabata, T. Kawai, Jpn. J. Appl. Phys. 38, 2505 (1999).
连结：
[5]. DetchprohmT,HiramatsuK,AmanoH, “Hydride vapor phase epitaxial growth of a high quality GaN film using a ZnO buffer”, Journal of applied physics, vol.61, No.22, November 1992, pp.2688-2690.
连结：
[6]. Yamada, Takahiro,et al. Toshiyuki Morizane, Tetsuhiro Arimitsu, Aki Miyake, Hisao Makino, Naoki Yamamoto, Tetsuya Yamamoto, “Application of low resistivity Ga-doped ZnO films to transparent electromagnetic interference shielding material”, Thin Solid Films, vol.517, no.3, Dec.2008, pp.1027-1031.
连结：
[7]. Gorla, C. R., Emanetoglu, N. W., Liang, S., Mayo, W. E., Lu, Y., Wraback M. and Shen H., “Structural, optical, and surface acoustic wave properties of epitaxial ZnO films grown on (0112) sapphire by metalorganic chemical vapor deposition”, Journal of Applied Physics, vol.85, no.5, Mar.1999, pp.2595-2602.
连结：
[8]. Matejka Podlogar , Jacob J. Richardson, Damjan Vengust, Nina Daneu, Zoran Samardija , Slavko Bernik , and Aleksander Recnik, “Growth of Transparent and Conductive Polycrystalline (0001)-ZnO Films on Glass Substrates UnderLow-Temperature Hydrothermal Conditions”, Applied Physics Letters, vol.22, 2012, pp. 3136-3145.
连结：

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引用含有DOI的文献

DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。 如想对DOI的使用与概念有进一步了解，请参考 （ ） 。

DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。如想对DOI的使用与概念有进一步了解，请参考（）。