電漿化學氣相沉積奈米碳纖維成長特性

Growth Characteristics of Carbon Nanofibers Prepared by Plasma Enhanced Chemical Vapor Deposition

10.6409/JMSE.200406.0116

林建志(C. C. Lin)；顏榮賢(J. H. Yen)；呂英治(I. C. Leu)；洪敏雄(M. H. Hon)

電漿化學氣相沉積、奈米碳纖維管、催化劑、方向性成長、模板成長 ； Plasma-enhanced chemical vapor deposition ； Carbon nanofibers ； Catalyst ； Aligned growth ； Template growth

材料科學與工程

36卷2期（2004 / 06 / 01）

116 - 120

繁體中文

本研究利用電漿化學氣相沉積法，以乙炔為碳源、鎳金屬為催化劑，於550ºC基板溫度下成長奈米碳纖維材料。結果顯示：於催化劑前處理方面，濺鍍鎳金屬薄膜於550ºC、氫氣電漿環境下，進行分裂、還原，可形成均勻分佈之奈米尺寸鎳顆粒，提供碳纖維成長所需之觸媒。此製程可製備大面積、均勻分佈且垂直基板排列成長之奈米碳纖維陣列，並由拉曼光譜分析顯示，在低溫製程下，此碳材料具石墨結晶。另外，選用不同厚度催化劑薄膜，會造成不同成長型態的奈米碳纖維，隨鎳催化劑薄膜的厚度遞減，纖維狀碳材料的成長密度愈高，直徑分佈愈為集中。於模板輔助成長方面，多數碳纖維由氧化鋁模孔側壁或表面長出，亦可沿垂直基板表面方向進行方向性成長。

In this research, carbon nanofibers have been synthesized from acetylene by plasma-enhanced chemical vapor deposition on nickel-coated silicon substrate at 550ºC. The experimental results show that sputtering nickel films can be reduced and agglomerated into uniformly distributed nanometer-sized particles during the process of catalyst pretreatment, which can be employed to assist the growth of carbon nanofibers. The preparation of large area, uniformly distributed and vertically aligned carbon nanofiber arrays has been successfully performed. It can be confirmed that this carbon material obtained from low temperature process contains a portion of graphite crystallization by Raman spectra analysis. Moreover, the thickness of nickel coatings shows a great impact on the growth characteristics of carbon nanofibers. With decreasing Ni coating thickness, the nucleation density of nanofibers increases and the diameter distribution becomes more concentrated. For the part of templated-assisted growth of carbon nanofibers, most nanofibers grow from the wall of the channel or the AAO membrane surface, which are also vertically aligned to the substrate.