真空燒結與熱均壓處理對Ni65Cr35合金靶材微結構及其性質之影響

Effects of Vacuum Sintering and Hot Isostatic Pressing Treatments on the Microstructure and Properties of Ni65Cr35 Alloy Targets

10.30069/MM.201303_57(1).0005

張世賢(S. H. Chang)；林峻丞(C. C. Lin)；陳敬騏(J. C. Chen)；梁誠(C. Liang)；林漢偉(H. W. Lin)

鎳鉻合金靶材 ； 真空燒結 ； 熱均壓 ； 粉末冶金 ； Ni-Cr alloy targets ； Vacuum Sintering ； HIP ； Powder Metallurgy

鑛冶：中國鑛冶工程學會會刊

57卷1期（2013 / 03 / 01）

62 - 68

繁體中文

以往純金屬與合金靶材通常以熔煉鑄造方式製作，然而鎳鉻合金靶材以熔煉方式製造時容易產生成份偏析、微結構不均勻與多孔性等缺陷，即使後續經熱處理或熱加工，亦無法將缺陷完全去除。因此，本研究利用粉末冶金之真空燒結（Vacuum Sintering）與熱均壓（HIP）的粉末冶金方式，製備鎳鉻合金靶材，並藉由進行一系列的實驗測試，以探討不同粉末冶金製程對鎳鉻合金靶材性質之影響。使用真空燒結溫度為1375℃一小時的Ni65Cr35燒結合金靶材，其相對密度為78.80%，橫向破壞強度（TRS）為258.81 MPa，在經過四小時1260℃ HIP後相對密度提高到79.20%。此一結果顯示利用熱均壓處理能有效消除靶材內部封閉孔隙及改善機械性質，並獲得高緻密度與高性質之鎳鉻合金靶材。

Pure metal and alloy targets were usually made by melting and casting methods. Ni-Cr alloy targets produced by the melting processes had ingredient segregation, non-uniform microstructure and high porosity. These defects could not be fully eliminated by heat treatment and hot-working process. In this study, we used vacuum sintering and hot isostatic pressing (HIP) techniques of powder metallurgy technology to produce Ni-Cr alloy targets. We conducted a series of experimental tests to explore the characteristics and effects of different powder metallurgy processes on the Ni-Cr alloy targets. Experimental results showed that the relative density of Ni65Cr35 alloy targets reached 78.80 % and the TRS increased to 258.81 MPa after 1375℃ sintering for 1 h. The relative density increased to 79.20 % after 1260℃ 175 MPa 4 h HIP treatment. HIP process effectively eliminated any internal pores and improved the mechanical property of the sintered Ni-Cr alloy targets.