Electrolyte Electroreflectance as a Technique for Semiconductor Characterization

黃鶯聲(Y. S. Huang)；陳鳳美(H. M. Chen)；張創然(C. J. Chang)；詹國禎(G. J. Jan)

Chinese Journal of Physics

23卷2期（1985 / 07 / 01）

143 - 156

英文

A microcomputer based electrolyte electroreflectance (EER) system has been installed. With this system we have investigated the spatial variations of composition across the surface of Ga1-xAlxAs as well as the spatial variations of doping concentration of GaP and GaAs with a resolution of about 150 μm. We have demonstrated that EER is a convenient nondestructive tool for semiconductor characterization. The advantages of this method comparing to other techniques are discussed.

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