Microstructural Study of YBa2Cu3O7-χ Thin Films on Si with MgO as a Buffer Layer

S. N. Hsu；R. J. Lin

Chinese Journal of Physics

31卷6S期（1993 / 12 / 01）

1239 - 1244

英文

A microstructural study of YBCO thin films grown on Si with MgO as a buffer layer by the rf magnetron sputtering method combined with the hot-wall sputtering method has been carried out. The structure of the thin films were investigated by XRD and TEM. The highly c-oriented YBCO thin films on the polycrystalline MgO buffer layer were found. However, around the interface between YBCO and MgO the orientation of YBCO is a-oriented rather than c-oriented, and the interface between MgO and Si is an amorphous oxide layer, the polycrystalline MgO was found above the oxide layer. The relationship between the superconducting property and the interface microstructure is also be discussed.