The Thickness Dependent of Optical Properties, Resistance, Strain and Morphology of Mo Thin Films for The Back Contact of CIGS Solar Cells

Chih-Hao Lee；Fong-Gang Guo；Chia-Chin Chu

Chinese Journal of Physics

50卷2期（2012 / 04 / 01）

311 - 321

英文

The Mo layer was used as conducting back contact on a CIGS solar cell. Mo thin films were sputtering deposited on glass substrates. The morphology, stress, resistance and optical properties were measured by X-ray reflectivity, X-ray diffraction and uv-vis spectrometer as functions of film thicknesses in this work. The Mo layers on the glass substrates exist some tensile stress of about 5 ~ 7 GPa. These tensile stresses make the Mo layers easy to peel off from the glass. The sheet resistance is larger than the inversed thickness law, which might due to a significant natural oxidation layer on the top surface and small grain sizes. With the higher series resistance of thinner Mo thin films, the concept of using double side CIGS solar cell is not feasible.