Total Electron Scattering Cross Sections of SiH4 and PH3 Molecules in the Energy Range from 10 eV to 5000 eV

Xiao-Ming Tan；Xue-Mei Liu

Chinese Journal of Physics

50卷4期（2012 / 08 / 01）

573 - 580

英文

The total cross sections for electron scattering from SiH4 and PH3 molecules in the energy range from 10 eV to 5000 eV are calculated with the additivity rule method. The present results are compared with the available experimental and theoretical data. It shows that the additivity rule method is very successful for calculating the total cross sections of electron scattering from SiH4 and PH3 molecules in the energy range from 200 eV to 5000 eV. The total electron cross sections for SiH4 from 1000 eV to 5000 eV, and for PH3 from 10 eV to 5000 eV are calculated based on the additivity rule method.