極紫外光的感測與成像：螢光奈米鑽石的新應用

Sensing and Imaging of Extreme Ultraviolet Radiations: A New Application of Fluorescent Nanodiamonds

吳沛婕(Pei Jie Wu)；張煥正(Huan-Cheng Chang)；楊騰毅(Teng-I Yang)

科儀新知

240期（2024 / 09 / 30）

35 - 44

繁體中文;英文

當今半導體業有賴摩爾定律來提升電晶體的性能，為了實現此一目標，極紫外（EUV）光刻是一項關鍵技術。EUV輻射的波長短，介於10－121nm之間，製造商因此能夠在晶片上繪製奈米尺寸的電路圖案，推動半導體技術的革新，並確保摩爾定律的延續。隨著各種EUV輻射光源的產生，EUV光束線的診斷變得至關重要，也成為熱門議題。本文探討了一項創新的EUV檢測器，使用螢光奈米鑽石（FND）薄膜作為閃爍體，將EUV光轉換為可見光，獲取影像。此裝置不易被高能量輻射損壞，非常適用於光束品質的評估和空間位置的監測，能夠提供全方位的資料以進行深入分析，並具備廣泛的應用潛力。

The semiconductor industry relies on Moore's Law to drive the advancement of transistor performance. Extreme ultraviolet (EUV) lithography is a key technology in achieving this goal. EUV radiations have short wavelengths (10-121 nm), allowing manufacturers to etch nanoscale circuit patterns on chips, thus advancing semiconductor technology and ensuring the continued relevance of Moore's Law. With the availability of various types of EUV light sources, beam diagnostics of the radiations has become critical, rendering the detector a crucial component. This article discusses an innovative EUV sensing and imaging device that uses fluorescent nanodiamond (FND) films as a scintillator to convert EUV light into visible light and produce images. The diamond-based scintillator is not damaged by high-energy radiations and is useful for assessing beam quality and monitoring its spatial positions, providing comprehensive information for in-depth analysis and wide-range applications.