三氯矽甲烷燃燒時鹽酸氣體、鹽酸氣膠及氯氣排放情形之研究

A Study on the Emissions of Acid Gas, Acid Aerosols and Chlorine from the Burning of Trichlorosilane

10.7005/JOSH.201203.0079

粟自強(Jhy-Charm Soo)；黎秀蓉(Siou-Rong Li)；陳政任(Jenq-Renn Chen)；張振平(Cheng-Ping Chang)；何雨芳(Yu-Fang Ho)；李文智(Wen-Jhy Lee)；蔡朋枝(Perng-Jy Tsai)

三氯矽甲烷燃燒 ； 相對溼度 ； 鹽酸 ； 氯氣 ； 排放係數 ； Trichlorosilane burning process Relative humidity ； Hydrogen chloride ； Chlorine ； Emission factor

勞工安全衛生研究季刊

20卷1期（2012 / 03 / 01）

78 - 93

繁體中文

本研究旨在探討三氯矽甲烷（trichlorosilane，TCS）燃燒時，鹽酸氣膠（HClp）、鹽酸氣體（HClg）及氯氣（Cl2）之排放特徵。本研究建置一暴露腔在設定空氣置換率為6 ACH情形下，針對四種不同相對濕度（RH；57.3％、65.5％、79.8％及89.8％），進行TCS燃燒實驗。HClp係利用微米及奈米微孔均勻沉積衝擊器（Nano-and Micro-Orifice Uniform Deposit Impactor，Nano-MOUDI及MOUDI）實施粒徑分布採樣。HClg及Cl2依據NIOSH 7903及NIOSH 6011分別利用矽膠管及銀膜濾紙進行樣本採集。HClp、HClg及Cl2均以IC-ECD進行分析。結果發現TCS燃燒後生成物依序為HClp（＝1.30×10^5～1.46×10^5 mg／m^3）＞HClg（＝9.03×10^3～11.4×10^3 mg／m^3）＞Cl2（＝1.91×10^3～2.18×10^3 mg／m^3）；HClp粒徑分布以聚集模式（accumulation mode）為主（MMADs＝0.808～1.04μm；GSDs＝2.13～3.50）。從燃燒前後氯之質量平衡的結果發現，理論值與量測值之比值為～0.9，可歸因於HClp 及HClg附著於腔體內部之器壁損失。另本研究亦建立TCS燃燒時前述三種污染物之排放係數及排放率，可做為TCS作業場所選用呼吸防護具及擬定控制策略之參考。

This study was set out to investigate the emission characteristics of hydrogen chloride, in both particle phase (HClp) and gaseous phase (HClg), and chlorine (Cl2) during the trichlorosilane (TCS) burning process under various humidity (RH) conditions. Four RH conditions (=57.3％, 65.5％, 79.8％ and 89.8％) were selected to simulate the moisture conditions of the test chamber and the air exchange rate was specified at 6. Each test condition was repeated three times and HClp, HClg and Cl2 were collected during each test run. HClp were collected using Nano- and Micro-Orifice Uniform Deposit Impactor. HClg and Cl2 were sampled per NIOSH method 7903 and 6011, respectively. All samples were analysed by ion chromatography-electron capture detection (IC-ECD). For the four selected RH conditions, HClp was the most dominant by-product (=1.30×10^5 ~ 1.46×10^5 mg/ m^3), followed by the HClg (=9.03×10^3 ~ 11.4×10^3 mg/m^3) and Cl2 (=1.91×10^3 ~ 2.18×10^3 mg/ m^3) during the TCS burning process. We also found that HClp fell to the particle size range of the accumulation mode (MMADs=0.808 ~ 1.04μm; GSDs=2.13 ~ 3.50). The ratios of measured chloride emitted concentrations to the theoretical values were slightly less than unity mostly because of wall losses of HClp and HClg during the experimental campaigns. We have also established the emission factors and emission rates of HClp, HClg and Cl2, respectively. The above information will help industries to select appropriate personal respirator and initiate suitable control strategy.

1. Centre Européen des Silicones, Safe handling of chlorosilanes; 2003.
2. Agabiti, N,Ancona, C,Forastiere, F,Napoli, AD,Presti, EL,Corbo, GM(2001).Short term respiratory effects of acute exposure to chlorine due to a swimming pool accident.Occupational and Environmental Medicine,58,399-404.
3. Chow, W,Miller, MJ,Torrens, IM(1994).Pathways of trace-elements in power-plant interim research results and implications.Fuel Processing Technology,39,5-20.
4. Friedlander, SK(2000).Smoke, dust, and haze: fundamentals of aerosol dynamics.New York:Oxford University Press.
5. John, WEH,Higglns, T,Kayser, RA,Kremer, P,McMahan, SW,Patrick, L(1999).Manual on chlorosilane emergency response guidelines.
6. Kose, A,Kose, B,Acikalin, A,Gunay, N,Yildirim, C(2009).Myocardial infarction, acute ischemic stroke, and hyperglycemia triggered by acute chlorine gas inhalation.American Journal of Emergency Medicine,27,1022.
7. Mores, TF(1984).,The Defense Technical information Center.
8. Rabinowitz, PM,Siegel, MD(2002).Acute inhalation injury.Clinics in Chest Medicine,23,707-15.
9. Salem, SAK(2005).Inhalation toxicology.New York:CRC Press.
10. Schenkel, A,Schaber, K(1995).Growth of salt and acid aerosol-particles in humid air.Journal of Aerosol Science,26,1029-39.
11. Uyan, Z,Carraro, S,Piacentini, G,Baraldi, E(2009).Swimming pool, respiratory health, and childhood asthma: Should we change our beliefs.Pediatric Pulmonology,44,31-7.