半導體產業CMP混合污泥資源再用於混凝土

CMP Sludge as a Resource in Concrete

10.29847/JNUU.201006.0011

李增欽(Tzen-Chin Lee)；張介人(Chieh-Jen Chang)；蘇訓緯(Xun-Wei Su)；林郭港(Kuo-Kang Lin)

CMP混合污泥 ； 混凝土圓柱試體 ； 抗壓強度 ； 奈米顆粒 ； 卜作嵐反應 ； Chemical mechanical polishing ； cylindrical concrete specimen ； compressive strength ； nano-particles ； pozzolanical reaction

聯大學報

7卷1期（2010 / 06 / 01）

219 - 233

繁體中文

半導體工業於晶圓製造之平坦化過程，通常是以化學機械研磨(CMP)處理，但該製程需使用大量之超純水，且會產生大量之廢水與污泥。該等因含有奈米級SiO2、Al2O3、CaF2微粒與有機毒物等有害物質，若未妥善處理而隨意廢棄，對生態環境與人體健康可能造成鉅大的危害。本文嘗試以台中科學園區某廠所提供之CMP混合污泥，用以取代10wt.%水泥，並選取0.45、0.55與0.65三種水膠比，灌鑄成10-cmΦ×20-cmH混凝土圓柱試體，進行凝結試驗、抗壓強度、應力應變量測與毒性特性溶出等試驗。其結果顯示：CMP試樣之毒害重金屬溶出濃度均低於法規值。又，CMP混凝土試體於齡期1天時，雖然其強度皆低於純水泥混凝土（OPC混凝土）試體，但於3天齡期時，兩者之抗壓強度則相仿，而於7天齡期時，則均高於OPC混凝土試體強度約21-37%，於14-90天齡期時，CMP混凝土強度亦均高於OPC混凝土強度約為23%-38%間，似顯現可將CMP混合污泥做為混凝土水泥取代物，而實際應用於營建工程，對環境生態與永續發展應有助益。

Chemical mechanical polishing (CMP) is a conventionally adopted process in integrated-circuit (IC) factories during the process called ”planarization” on silicon wafers. Because planarization consumes considerable amounts of super pure water, and leads to large quantities of wastewater and sludge, which are composed of hazardous materials such as nano-particles of SiO2, Al2O3, CaF2, and unknown organics. These nano-particles are potentially dangerous if released into the environment. The specimens of 10-cm Φ×20-cm H cylinder of CMP sludge blended cement concrete (CMP concrete) were manufactured with 10% cement replacement by sludge powder. The three water/cementitious (w/c) ratios, 0.45, 0.55 and 0.65, were selected to mold the specimens for setting time, compressive strength and stress-strain test. The strengths of CMP concrete specimens were below the ordinary plain cement concrete (OPC concrete) specimens at ages of 1-3 days, those were 21-37% higher than OPC concrete cylindrical specimens at age 7-day, and were about 23-38% higher than OPC concrete specimens at ages of 14-90 days. The results revealed the feasibility of recycling the CMP sludge as resources of construction materials, and that is good for sustainable development.

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