利用二氧化矽／二氧化鈦雙層抗反射膜提升矽太陽能電池特性之探討

Improving the Silicon Solar Cell Performances by SiO2/TiO2 Double Layer Antireflection Coating

10.29768/JNTUT.200906.0002

何文章(Wen-Jeng Ho)；余沐榮(Mu-Rung Yu)

矽太陽能電池 ； 抗反射膜 ； 轉換效率 ； Silicon Solar Cell ； Anti-Reflection Coating ARC ； Conversion Efficiency

臺北科技大學學報

42卷1期（2009 / 06 / 01）

17 - 29

繁體中文

本文利用二氧化矽／二氧化鈦(SiO2/TiO2)雙層抗反射膜來提升矽太陽能電池特性。我們利用Film Star及Macleod軟體來模擬抗反射膜光學特性及光譜儀來進行薄膜光學特性量測，並成功的蒸鍍出反射率隨波長分佈為V型(V-Coating)與W型(W-Coating)之SiO2/TiO2雙層抗反射膜。 我們研製出具二氧化矽／二氧化鈦(SiO2/TiO2)雙層抗反射膜矽太陽能電池，在AM1.5Ｇ太陽光模擬器下進行太陽能電池特性量測。典型的V-Coating抗反射膜太陽能電池比未加抗反射膜太陽能電池之短路電流密度(JSC)增加了約16.52%，填充因子(FF)則提升了21%，而轉換效率(η)也提升了40.18%。同時，V-Coating抗反射膜太陽能電池特性比W-Coating抗反射膜太陽能電池特性更佳。

SiO2/TiO2 double layer anti-reflection coating on a simple-structure silicon crystalline solar cell to improve the cell performance was proposed. In this work, a ”Film Star and Macleod” commercial software was firstly used for film simulation. Then reflectance/transmittance measurement was for film optical-quality characterization. The W-shape (W-Coating) and V-shape (V-Coating) of SiO2/TiO2 double layer anti-reflection coating have been successfully deposited by E-beam evaporator. We fabricated and demonstrated a simple-structure silicon crystalline solar cell with SiO2/TiO2 double layer anti-reflection coating. Under a simulated AM 1.5G condition, the typical cell with V-Coating shown a better performance than a cell without anti-reflection coating. The short circuit current density (JSC) of 16.52%, fill factor (FF) of 21%, and conversion efficiency (η) of 40.18% of improving performance were obtained. In addition, we also found that the performance of V-Coating cell was superior to a W-Coating cell.