题名

The Parylene Bowed-Type Valves

DOI

10.6180/jase.2005.8.3.11

作者

Hsin-Hsiung Wang;Kuan-Chun Liu;Kai-Chung Ko;Lung-Jieh Yang

关键词

Bowed-type valve ; Circular microchannel ; Parylene ; SU-8

期刊名称

淡江理工學刊

卷期/出版年月

8卷3期(2005 / 09 / 01)

页次

245 - 248

内容语文

英文

英文摘要

This paper demonstrates a newly developed parylene bowed-type valve with the same working principle of the ”buckled straw”. Such a new design of the valve uses the buckled region of plastic tubes as the on/off switch for flow control, and there is no need of adding deformable diaphragms or sealing parts into the valve device. By the merit of its concise mechanism, i.e., a straight pipeline with the region for buckling, the bowed-type valve intrinsically operates with almost zero dead volume. The fabrication sequence of this new valve combines the techniques of sacrificial mould of capillary glass tubes, conformal coating of parylene and SU-8 photolithography. A valve device of 1 cm long, 0.8 cm wide is demonstrated, and the turn-on angle of this valve verified as 135° experimentally.

主题分类 基礎與應用科學 > 基礎與應用科學綜合
工程學 > 工程學綜合
工程學 > 工程學總論