Electron Beam Assisted Gas Phase Synthesis of SiO2 Nanoparticles in an Ambient Condition

Jin-Hyoung Kim；Young-Ku Sohn；In-Soo Kim；Bum-Soo Han；Weon-Gyu Shin

SiO2 nanoparticle ； Electron beam irradiation ； Gas phase synthesis

Aerosol and Air Quality Research

12卷6期（2012 / 12 / 01）

1467 - 1471

英文

This study presents a novel use of an electron beam irradiation system for the gas phase synthesis of nanoparticles, and demonstrates that SiO2 nanoparticles can be synthesized in ambient conditions. The formation of SiO2 nanoparticles is confirmed by the vibrational modes shown in FT-IR spectra, and the binding energy of Si 2p in the X-ray photoelectron spectrum. In this work, nanoparticles with average diameters of 210 nm and 73 nm were produced. The average particle size was controlled by adjusting the residence time of the precursor vapor.

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