二維自由度DVD雷射量測PZT微動定位系統之研製

Development of a 2-DOF DVD Laser Probing PZT Micro Positioning System

10.6989/JN.201112.0161

童景賢(Jing-Syan Torng)；黃元瑞(Yuan-Ruey Huang)；戴仲賢(J. S. Dai)

雷射讀取頭 ； PID控制 ； 微動平台 ； DVD ； Laser pickup head ； PID control ； Micro-stage

南亞學報

31期（2011 / 12 / 01）

161 - 174

繁體中文

隨著科技的日新月異，已經從微米時代走入了奈米時代，而在奈米科技領域中，有許多的應用都需要高精度的微定位平台為載具。對微定位平台的研究，一般都以壓電陶瓷來驅動平台以移動工件，此類平台僅提供幾十微米以下的短行程微動位移，而對微奈米長行程的研究，則須要較長行程的定位平台來移動試件，一般需要幾公分的位移及10奈米左右的精度。近年來在長行程奈米定位平台的研究以一維居多，且以長行程的粗位移加上微動位移的兩段式定位為主，而位移量幾乎都以雷射干涉儀進行回授控制。但因雷射干涉儀價格昂貴，使得線上檢測極為耗費成本且部分平台結構及傳動元件取自工業成品，使得誤差源無法避免，故定位準確度或精密度約只能達到1μm至0.1μm。本計劃所研製之『二維自由度DVD雷射量測PZT微動定位系統』是使用市面上售價低於兩千元台幣之DVD player，並利用其雷射光學讀寫頭製作兩套DVD雷射探頭，以取代售價昂貴之雷射干涉儀，並用來測量定位系統上XY兩軸之位移量。此兩套自行研製DVD雷射探頭的成本約只有一套市面上雷射干涉儀售價的二百分之一，而其精度可達到±100奈米，如此將可大為降低購置成本，以使產業界之相關應用更為普及。

The rapid growing of nano-technology in the industry has lead the micro-motion stages being widely used in various applications, such as semiconductor industry, biomedical industry and micro/nano inspection. Normally, micro stages use PZTs as the actuators to move and it normally offers the displacement of tens of micrometer. For long displacement micro-motion, the resolution requirement of few centimeters displacement is about 10 nanometers.The research on long displacement nano-technology is normally focused on one-degree-of-freedom displacement with two-step method that combines the coarse distance adjustment and the fine displacement. As for measuring the displacement, Laser Interferometer (LI) is regarded as the feedback sensor for probing the micro stage position. However, the cost of LI is nevertheless too high.This project has established a two-degree-of-freedom DVD laser probing PZT micro positioning system which applied the optical pickup head of a commercialized DVD player which costs only less than NT$2000. The two sets of home made DVD laser probe are able to substitute the costly LIs to measure the displacement of X-Y positioning stage and the accuracy can reach ±100nm with only 0.05% of Laser Interferometer's cost. With the cost down, it has more advantage of applying laser probe on micro stage.