Design and Control of an Optical Alignment System Using a XXY Stage Integrated with Dual CCDs

10.6493/SmartSci.2014.242

Chih-Jer Lin；Shen-Kai Yu；Yu-Chung Li；Chao-Wen Yang

XXY stage ； Dual CCD's ； Artificial Neural Network

Smart Science

2卷3期（2014 / 08 / 03）

160 - 167

英文

The aim of this study is to investigate assembly and positioning tasks of a micro-component using a co-plane XXY stage integrated with an automatic optical inspection (AOI) system instead of manual alignment. An artificial neural algorithm is added for alignment to enhance the alignment accuracy of the system. Therefore, a servo alignment system is proposed to use the AOI system to guide the XXY stage using vision technology. The image identification system is used to make the specimen align the target specimen using dual CCDs. Since the XXY stage has no positioning feedback of the optical scale or encoder, the artificial neural network (ANN) system is used to map the relative relationship between the image position and the actual XXY stage's position.