ACCELERATION SENSITIVE FULLY-DECOUPLED TUNING FORK (FDTF) MEMs GYROSCOPE WITH 1°/HR BIAS INSTABILITY

Feng-Yu Lee；Kai-Chih Liang；Emerson Cheng；Sheng-Shian Li；Weileun Fang

MEMS ； Gyroscope ； Decoupled ； Tuning Fork

微系統暨奈米科技協會會刊

36期（2016 / 11 / 10）

14 - 19

英文

This study presents the design and implementation of a single-axis MEMS vibratory gyroscope with reduced coupling error and enhanced vibration resistance. Features of this study are (1) exploiting the fully-decoupled mechanism to minimize the coupling error between the operating modes; (2) introducing the tuning fork architecture combined with specific coupler designs to enhance the vibration resistance (3) a compact structural design with small footprint (2mmx2mm). Measurement results show a reduced coupling error signal of near 126°/s, and the acceleration sensitivity is below 1.5°/s/g. Contributed to the reduction of the coupling error and external vibration interferences, the FDTF gyroscope achieved a bias instability of 1°/hr and the ARW of 7.2°/hr/√Hz.