Design of a Hydrostatic Slide Table for Precision Surface Grinding Machine

10.6567/IFToMM.14TH.WC.PS18.008

Hua-Chih. Huang；Shih-Jie Wei；Chih-Ming Chen

Surface Grinding Machine ； Recess-Type ； Hydrostatic slide table ； Capillary

Proceedings of the 14th IFToMM World Congress

14th-5（2015 / 11 / 06）

510 - 513

英文

This paper aims to develop the design theory and analysis tool for hydrostatic slide tables using capillary in precision surface grinding machine. Basic performance characteristics of hydrostatic bearing pads using recess-type such as, load capacity, stiffness, damping, flow rate of oil, pumping power, friction power loss, etc. will be analyzed in this study. The design theory and analysis tool development of the hydrostatic slide table will be based on considering a single bearing pad, which constitutes then the basic, modular element to be used to construct any desired table/slide configuration. Once the characteristics of one pad are modelled and analyzed satisfactory in function of the design parameters, the obtained results can be used in other dedicated design environments to simulate the performance behaviour of any integrated system of interest, which comprises a number of different pads in a hydrostatic slide table.