以掃描式光電子能譜顯微術研究表面化學反應

Scanning Photoemission Microscopy Studies of Surface Chemistry

10.6623/chem.2002036

柯陸詩(Ruth Klauser)；洪一弘(I. H. Hong)；魏德新(D. H. Wei)；莊東榮(T. J. Chung)

同步輻射 ； 光電子能譜 ； 顯微術 ； 表面化學 ； synchrotron radiation ； photoemission ； microscopy ； surface chemistry

化學

60卷3期（2002 / 09 / 01）

369 - 379

繁體中文

本研究群在同步輻射研究中心(SRRC)所建造之掃描式軟X 光光電子能譜顯微鏡(SPEM)具有0.15 微米的空間鑑別力以及0.25eV 的能譜解析度。結合同步輻射光源的高亮度及波長連續可調性，可同時提供奈米結構材料中各元素不同化學狀態之二維分佈以及表面形貌相互關係之訊息。藉此可以深入地探測奈米結構的特性及物體表面與材料介面之化學反應。本報告以最近進行之SPEM 局部化學分析為例，包括掃描探針引發之表面氧化作用，有機薄膜經電子束與電漿激發之化學變化，奈米碳管尖端之電子能態等主題，所獲取之實驗結果加以描述和討論，並簡述未來之展望。

We have built a soft X-ray scanning photoemission microscope (SPEM) at SRRC with a spatial resolution of 0.15 um and electron energy resolution of 0.25 eV at present. With the unique combination of the bright synchrotron light source and wavelength tunability, SPEM can provide two-dimensional chemical analysis of nanostructured materials and elemental mapping of surface topography. The chemical and spatial information can be utilized for in-depth understanding of the structural characteristics as well as the basic interfacial reactions. In this report, we present some recent studies on the microchemistry of materials interfaces using SPEM. These include the scanning probe microscope induced surface oxidation, electron-beam and plasma assisted chemical modification of organic thin films, and the electronic structure at the tips of carbon nanotubes, etc. Representative experimental results are described and discussed, and the future prospect for the spectromicroscopy is given.