用於磁浮離心式壓縮機之感應型位置感測器

Inductive position sensor for maglev centrifugal compressor

陳兆芸(Chao-Yun Chen)；洪財旺(Tsai-Wang Hung)；王建昌(Chien-Chang Wang)；劉中哲(Chung-Che Liu)；張鈺炯(Yu-Choung Chang)

無油離心機 ； 磁浮軸承 ； 感應式位移感測器 ； Active Magnetic Bearing ； inductive position sensor ； linearity ； sensitivity

冷凍空調&能源科技

108期（2018 / 03 / 10）

37 - 41

繁體中文;英文

本研究目的為開發感應式位移感測器設計技術，針對感應式位移感測器的運作原理、數學模型，進行研究。回顧前人研究過的相關文獻，從中找尋資料建立數學模型，並與有限元素模擬比較，模型修正到可接受範圍。進行感測器電感值量測，將模型解析解與實驗數據比較，確認是否需要修正模型，最後得到一套可信度較高的數學模型以供感測器開發使用。本研究先就感應式位置感測器運作原理及靜態數學模型做詳細介紹。再以電感對位置變化的LCR Meter（阻抗測試儀）量測實驗進行數學模型的驗證，並針對實驗結果討論之。感測電路採用RLC共振原理，並搭配整流濾波電路，最佳化感測器線性度與靈敏度。完成之感應探頭12顆品質滿足需求，電感值與電阻值誤差皆小於2%，調校之電路搭配自製感應探頭，量測位置對電壓的感測器特性曲線，非線性度小於0.5%，靈敏度大於7mV／μm，滿足磁浮離心冰水機之需求。

The major target of this research is to develop inductive position sensor for AMB chiller. We survey some paper of the topic and discuss fundamental principle and mathematic model. Furthermore, we compare the mathematic model with FEM simulation and make a brief conclusion. After simulation, we measure resistance and inductance of the sensor by LCR meter. About sensor circuit, the resonance principle of the RLC circuit have been applied on such kinds of position sensor for decades. We go away farther, however, on an optimal design method. The design method could boost up design process of the circuit and give a satisfied linearity and sensitivity. We have made six differential sensor sets and measured their linearity and sensitivity. The data of linearity are less than 0.5% and the data of sensitivity could achieve 7mV/μm. All the data satisfy specifications of the 200RT chiller developed by ITRI.

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1. 劉中哲,洪財旺,王建昌(2023)。感應型位置感測器用於檢測微小距離的研究與測試。冷凍空調&能源科技，141，69-75。