感應型位置感測器用於檢測微小距離的研究與測試

Research and Test of Inductive position sensor for measure small distance

洪財旺(Tsai-Wang Hung)；王建昌(Chien-Chang Wang)；劉中哲(Chung-Che Liu)

主動式磁浮軸承 ； 感應式位置感測器 ； 微處理器 ； 線性度 ； 靈敏度 ； Active Magnetic Bearing(AMB) ； Inductive Position Sensor(IPS) ； microprocessor ； linearity ； sensitivity

冷凍空調&能源科技

141期（2023 / 09 / 10）

69 - 75

繁體中文;英文

本研究是以一組用於微小距離量測的電感式位置感測元件，針對感應式位置感測運作原理，以數學模式進行推導相對距離與電感大小的對應關係，並變動電感式位置感測元件與目標物的間隙，確認感測元件內電感特性變化；再以不同的諧振頻率與諧振電路，分析並計算出位置變動與感測元件電感變化情況，使相同位置感測元件可針對不同的量測需求，獲得最好的線性度設計。

In this study, a set of inductive position sensing elements used for micro-distance measurement is used. Aiming at the operating principle of inductive position sensing, the corresponding relationship between relative distance and inductance is deduced using mathematical models, and the gap between the inductive position sensing element and the target is changed to confirm the change of inductance characteristics in the sensing element. Then, the position change and the inductance change of the sensing element are analyzed and calculated with different resonant frequencies and resonant circuits, so that the same position sensing element can be used for different measurement requirements and obtain the best linearity design.

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