白光干涉垂直掃描之研究

Research on the Vertical Scanning of White-Light Interferometry

10.6342/NTU.2004.00884

葉易霖

垂直掃描 ； 三維影像疊合 ； Vertical Scanning method ； image merging method

國立臺灣大學機械工程學系學位論文

2004年

碩士

范光照

繁體中文

有鑑於目前光學干涉三維輪廓量測技術急需發展長景深、大範圍之精密量測能力，本研究深入分析韓國SNU Precision Company干涉儀系統 (3D Surface Profiling System -- SIS-1000) 之運作原理與元件規格。 研究之核心為發展白光干涉儀長景深、大範圍之垂直掃描能力，以SIS-1000作為實驗之基台，用垂直掃描法(Vertical Scanning method)配合SIOS雷射精密定位及Geomagic Studio軟體之三維影像疊合技術，量測大範圍三維表面輪廓資料與形貌重建。由實驗結果得知，所提出之加強型深度掃描法，能有效提供具大範圍或長景深之微細元件所需之三維形貌重建能力。

This study aims to establish the 3D profile measurement techniques of white-light interferometry with large vertical and horizontal measuring ranges. The purpose includes a complete investigation of the SIS-1000 (SNU Precision Company) surface profilometer for its operation principles and component specifications. The core of the research is to develop an effective methodology for large-range and long-depth 3D profile measurement with nano-scale resolution and accuracy. The measuring method includes vertical scanning and image merging method (Geomagic Studio) by using SIOS laser interferometer for the purpose of precision positioning. The proposed “enhanced vertical scanning method” combines traditional vertical scanning with image merging method. Along with the outcome of experiments, this achieves the perfect ability for 3D reconstruction techniques.

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