超音波清洗頭設計及性能探討

An Investigation in Design and Performance of an Ultrasonic Cleaner

蔣旭堂(Shiu-Tang Jiang)；祝楷博(Kai-Po Jhu)；鄭筵諭(Yan-Yu Zheng)

乾式超音波清洗 ； 氣流波頻 ； 膨脹腔 ； dry ultrasonic cleaning ； airflow frequency ； expansion chamber

先進工程學刊

14卷2期（2019 / 10 / 01）

93 - 102

繁體中文

乾式超音波清洗是通過高速氣流與超音波共同作用進行表面粉塵微粒的去除，其無需加裝冷卻和烘乾裝置，也不需要純度高的氣體或化學洗滌劑等高成本的耗材。本研究探討乾式超音波清清洗機產生超音波之設計，其超音波之產生是透過變截面空氣流道提高流速，使氣流波頻大於20kHz形成超音波。並利用COMSOL軟體模擬乾式超音波清洗機之氣流分析為清洗機提供設計依據，探討不同膨脹腔腔形對壓力和氣流速度的影響，得到入口流速的增大有利於出口流速的提高。

Dry ultrasonic cleaning is the removal of surface dust particles by high-speed airflow and ultrasonic waves. It does not require the installation of cooling and drying equipment, nor does it require high-cost consumables such as high-purity gases or chemical detergents. This report explores the design of ultrasonic waves generated by dry ultrasonic cleaning machines. The ultrasonic wave is generated by increasing the flow velocity through the variable cross-section air flow path, so that the air wave frequency is greater than 20 kHz to form ultrasonic waves. The flow analysis of the COMSOL software simulation dry ultrasonic cleaning machine is used to provide the design basis for the cleaning head. The influence of different expansion chamber shape on the pressure and air velocity is discussed. The increase of the inlet flow velocity is beneficial to the increase of the outlet flow velocity.

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