PMN-PT微型壓電能量擷取器之製作及其厚膜製程最佳化之研究

林士超

doi:10.6342/NTU201704061

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PMN-PT微型压电能量撷取器之制作及其厚膜制程最佳化之研究

Fabrication of Thick Film Piezoelectric Micro Energy Harvester based on PMN-PT and Process Optimization

林士超 , 硕士　　导师：吴文中　　

繁体中文 DOI： 10.6342/NTU201704061

铌镁酸铅-钛酸铅；悬臂梁；压电材料；气胶沉积法；微振动发电元件； PMN-PT ； cantilever beam ； piezoelectric material ； aerosol deposition ； power harvesting

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摘要 │ 参考文献 (82) │ 国际计量

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In the past studies, the vibration energy harvesting technologies have been studied intensively and based on material of lead zirconate titanate (PZT). The power outputs of piezoelectric MEMS generators were steadily improved year by year. Until now, the performance of energy harvesters(EH) had gradually reached the limit of the chosen materials. In our previous research, a significant increase in power output was achieved by altering the EH substrate material. In view of this, we introduce innovative piezoelectric material in this dissertation to expect a breakthrough in the limit of EH energy output. According to recently published literature, attention has been given to lead magnesium niobate–lead titanate (PMN-PT) material because of its high piezoelectric constant and electromechanical coupling factor.
	In this dissertation, 10 m of PMN-PT film was successfully deposited on stainless steel substrate by aerosol deposition. First part of this dissertation is to investigate critical parameters of aerosol deposition method and we found the pre-process for starting powder is a key to deposit PMN-PT layer. Powder milled for 3 hours and heated at 450 oC were chosen as the best deposition condition. Then, in order to increase piezoelectric properties of the device, annealing and poling process were necessary and optimal parameters were described as below: annealed at 525 oC, electric field was 30 V/μm, poling temperature was 150 oC, and poling time was 20 minutes.
	The experimental results show that the fabricated device excited at 0.5 g vibration level can generate a maximum output voltage of 7.7 VPP and corresponding power of 90.4 μW at the resonant frequency of 98 Hz. When given a comparison with previous work, the output performance is better than the PZT-based EH with same thickness, which had maximum output voltage of 6.2 VPP and corresponding power of 48.5 μW under 0.5 g acceleration.

参考文献 ( 82 ) 〈TOP〉

1. Amirtharajah, R. and A.P. Chandrakasan, Self-powered signal processing using vibration-based power generation. IEEE Journal of Solid-State Cirsuits, 1998. 33(5): p. 687-695.
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2. Roundy, S., P.K. Wright, and J. Rabaey, A study of low level vibrations as a power source for wireless sensor nodes. Computer Communications, 2003. 26(11): p. 1131-1144.
连结：
3. Chiu, Y. and V.F.G. Tseng, A capacitive vibration-to-electricity energy converter with integrated mechanical switches. Journal of Micromechanics and Microengineering, 2008. 18(10): p. 104004.
连结：
4. Cheng, S., N. Wang, and D.P. Arnold, Modeling of magnetic vibrational energy harvesters using equivalent circuit representations. Journal of Micromechanics and Microengineering, 2007. 17(11): p. 2328-2335.
连结：
5. Sodano, H.A., D.J. Inman, and G. Park, A Review of Power Harvesting from Vibration Using Piezoelectric Materials. The Shock and Vibration Digest, 2004. 36(3): p. 197-205.
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引用含有DOI的文献

DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。 如想对DOI的使用与概念有进一步了解，请参考 （ ） 。

DOI可强化引用精确性、增强学术圈连结，并给予使用者跨平台的良好使用经验，目前在全世界已有超过五千万个对象申请DOI。如想对DOI的使用与概念有进一步了解，请参考（）。